Canon Optical Equipment (Shanghai) Co., Ltd. is a company established by Canon in mainland China to provide business support and technical support for semiconductor and LCD panel production equipment. In addition to the exposure devices for the production of semiconductors and LCD panels manufactured by Canon, the company also operates all semiconductor and LCD panel production facilities undertaken by Canon Machinery, Canon Anewa and Canon Special Machines.
    Canon's history of semiconductor and LCD panel manufacturing equipment in mainland China can be traced back to the 1980s, when it began to export low-end semiconductor exposure devices (proximity exposure devices, mirror projection exposure devices) to China. In the 1990s, it also provided semiconductor customers in Shanghai area with i line Stepper, plasma glue removal equipment, atmospheric pressure film forming equipment and other semiconductor equipment manufactured by Canon Group. In the 21st century, with the rapid development of semiconductor technology in China, Canon further introduced KrFScanner and other high-end semiconductor exposure devices to China. At that time, Canon established a partnership with Mitsui & Co., Ltd. to further expand its product sales in China, and successfully expand its LCD panel production equipment market in China. Canon's LCD panel exposure devices have maintained a high market share since the early days of the Chinese LCD industry.